According to this article, this stuff on 65nm packs 5Mbit/mm2 and 10Mbit/mm2 on 45nm but runs at a slower 400MHz. Is it any future for large, on die (but slower) L3.
http://www.eetimes.com/news/semi/showArticle.jhtml?articleID=196601127
http://www.eetimes.com/news/semi/showArticle.jhtml?articleID=196601127