should i run memory at 533 or 667 mhz in dual channel

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ok guys here the deal. i have intel pentium 930 D with intel 965wh MB and dual channel memory at 667 with CAS 5. if i run it at 533 mhz i get CAS 4. so even running it at 533 dual channel i have memory speed of 1066. so it is over 800 bus speed of pentium d what do you guys recommened should i run it at 667 with CAS 5 or 533 With CAS 4