OLD CPUs - part2

[enewmen]

Hi All.

I got LOTS of good posts explaining how early computers where made.
A part I'm still missing was the early integrated circuit.

The small-scale integration (SSI) and Medium-Scale Integration (MSI) looked like the more modern bug-shaped Large-Scale Integration (LSI) 8088, 6502, etc. The SSIs where also made of silicon.

So, what I'm asking is: Where the old SSIs made like the early Intel chips using electron beam lithography or where they "stamped" on.

I did lots of searching & reading, but nothing explains this.
The oldest semiconductor manufacturing process I can find was 10 µm.
The closest I came was finding something called thin-film IC and thick-film ICs.

thanks!

 

[ko888]

So, what I'm asking is: Where the old SSIs made like the early Intel chips using electron beam lithography or where they "stamped" on.

From the early 1960’s through the mid-1980’s, photolithography used ultraviolet light from gas-discharge lamps using mercury.

Or are you talking about contact or proximity lithography?

 

[enewmen]

Best answer selected by enewmen.