Results for 22nm

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  • TSMC preps immersion lithography for sub-22nm wafer production
    January 16, 2006 – 1:30 PM
    Having already commenced pilot runs on 65nm wafer production since last year, Taiwan Semiconductor Manufacturing Company (TSMC) is now readying immersion lithography for 22nm production, according to Burn Lin, director of lithography R&D at TSMC.

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