Chinese quartz approved for semiconductor equipment and DRAM manufacturing, but it still can't break America's monopoly — China secures domestic supply for chipmaking components, but Spruce Pine still holds the crucible monopoly

Jiangsu Pacific Quartz, a high-purity quartz (HPQ) producer from China, is already supplying its HPQ material to leading domestic and overseas producers of chipmaking tools, including Lam Research and Tokyo Electron. More recently, the company's materials/components have passed certification by a domestic DRAM manufacturer. Analyst TP Huang, who hosts the China Tech Talk podcast, believes that the DRAM maker is CXMT.

While Pacific Quartz's achievements are significant, the company's components are used in semiconductor production equipment after the silicon wafer has been made. Meanwhile, Ingots for semiconductor wafers are grown in crucibles made from high-purity fused quartz, typically over 99.999% SiO₂ (5N+), with much tighter limits on individual critical contaminants. For now, such quartz can only be obtained in significant volumes from Sibelco and The Quartz Corp., which operate in Spruce Pine, North Carolina, and from Russian Quartz LLC, which can produce modest volumes.

Pacific Quartz has supplied Lam Research and Tokyo Electron with ultra-high-purity quartz consumables, such as LPCVD diffusion tubes, wafer boats, quartz ingots, quartz plates, and high-purity quartz tubes, since 2019–2020. Typically, quartz used for process equipment is 4N5 – 5N purity (~99.995–99.999% SiO₂). So Pacific Quartz's products are good enough for semiconductor tools.

More recently, Pacific Quartz said its quartz products manufactured from its own high-purity quartz sand passed qualification at a leading Chinese DRAM manufacturer, apparently CXMT, for use in 300-mm wafer production. This is particularly significant because it demonstrates a largely domestic supply chain for Chinese quartz that starts with Pacific Quartz's purified high-purity sand, which is then processed into semiconductor furnace-tube material that goes to a DRAM fab. While CXMT certainly uses equipment from Lam Research and Tokyo Electron, we cannot say for sure that all the quartz consumables that these tools use are made by Pacific Quartz.

Semiconductor furnace tubes are typically made from roughly 5N-class high-purity fused quartz, with stringent limits on electrically active and mobile contaminants, as they can migrate onto/into hot silicon wafers and alter transistor characteristics, ultimately creating defects and lowering yield.

While China-based Pacific Quartz can produce components for semiconductor production equipment, it still cannot produce crucibles good enough to grow silicon wafers with 9N–11N purity. Will it change in the foreseeable future? Only time will tell.

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