Update: ASML Denies Report it Was Working on China-Specific Lithography Tools

ASML
(Image credit: ASML)

DigiTimes reported that ASML is mulling the release of a special version of its deep ultraviolet lithography (DUV) tool that will comply with the latest U.S. export rules and that could be shipped to Chinese customers without a license. The device would enable companies like SMIC and Hua Hong to make chips on 28nm-class nodes and thicker, but it will not allow them to use more advanced nodes. However, the company has since denied this report.

Updated (7/6): ASML wrote us a note, saying that the DigiTimes report is incorrect. 

Anton Shilov
Contributing Writer

Anton Shilov is a contributing writer at Tom’s Hardware. Over the past couple of decades, he has covered everything from CPUs and GPUs to supercomputers and from modern process technologies and latest fab tools to high-tech industry trends.