Latest about DUV
ASML's roadmap for chipmaking lithography tools examined — from DUV to Low-NA, High-NA, Hyper-NA, and beyond
Premium ASML shipped 48 EUV lithography systems and 131 immersion DUV tools in 2025, generating €32.7 billion in total revenue and ending the year with a €38.8 billion order backlog.
U.S. lawmakers demand sales ban on chipmaking tools to China
Bipartisan group of lawmakers want the U.S. government to impose export controls on all wafer fab equipment bound to China except those that can be made locally and make allies do the following.
Chinese fabs are reportedly upgrading older ASML DUV lithography chipmaking machines
Premium Chinese fabs are quietly extending the useful life and performance of older ASML deep ultraviolet lithography systems by upgrading key subsystems, as Beijing pushes to sustain advanced chip output.
New 1.4nm nanoimprint lithography template could reduce the need for EUV steps in advanced process nodes
Premium Japan’s Dai Nippon Printing (DNP) claims to have developed a nanoimprint lithography template capable of patterning logic with a feature size of 1.4nm, with plans for mass production in 2027.
Chinese scientists discover method to cut defects by 99% with DUV chipmaking equipment
Premium But chipmakers already know this empirically.
European think tank considers punitive DUV machine export ban following China's latest round of rare earth export controls
Premium Think tank suggests tighter semiconductor controls amid rare earth tensions.
China bets on DUV as EUV blockade reshapes chipmaking — but it won't dethrone ASML's advanced lithography, for now
Premium With EUV locked out by sanctions, China is leaning on DUV multi-patterning and fledgling domestic scanners.
China's SiCarrier challenges U.S. and EU with full-spectrum of chipmaking equipment
Huawei-linked Chinese startup has developed a nearly complete suite of semiconductor manufacturing tools to enable fully domestic chip production amid escalating export controls.
