EUV
Latest about EUV

China bets on DUV as EUV blockade reshapes chipmaking — but it won't dethrone ASML's advanced lithography, for now
By Luke James Published
Premium With EUV locked out by sanctions, China is leaning on DUV multi-patterning and fledgling domestic scanners.

'Beyond EUV' chipmaking tech pushes Soft X-Ray lithography closer to challenging Hyper-NA EUV
By Anton Shilov Published
But will it ever materialize?

How TSMC managed to increase efficiency of ASML's EUV tools: System-level optimizations and in-house pellicles
By Anton Shilov Published
Premium TSMC has dramatically boosted EUV scanner throughput, pellicle performance, and energy efficiency through deep in-house innovations.

ASML and SK hynix assemble industry-first 'commercial' High-NA EUV system at fab in South Korea
By Anton Shilov Published
Initially for R&D use, until later this decade where it will transition to production

China-based firm delivers its first chipmaking tool that stamps nanoscale chip designs onto wafers
By Anton Shilov Published

Micron samples ground-breaking EUV-based memory
By Anton Shilov Published
And also a 30% increase in density

Company proposes 'tabletop' particle accelerators with petawatt lasers
By Anton Shilov Published
News Analysis Y-Combinator-backed startup eyes powerful laser wakefield accelerator for advanced lithography techniques.

Intel has championed High-NA EUV chipmaking tools, but costs and other limitations could delay industry-wide adoption: Report
By Anton Shilov Published
Delay, but not stop.
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