U.S. gov't revokes TSMC's authorization to ship tools to its fabs in China — special export license to be pulled by end of 2025
But TSMC vows to continue making chips on the mainland.

The U.S. has decided to revoke its special allowance for TSMC to export advanced chipmaking tools from the U.S. to its Fab 16 in Nanjing, China, by the end of the year. The decision will force the company's American suppliers to get individual government approvals for future shipments. If approvals are not granted on time, this could could affect the plant's operations.
No more waivers for TSMC's Fab 16
Until now, TSMC benefited from a general approval system — enabled by its validated end-user (VEU) status with the U.S. government — that allowed routine shipments of tools produced by American companies like Applied Materials, KLA, and LAM Research without delay. Once the rule change takes effect, any covered tool, spare part, or chemical sent to the site will need to pass a separate U.S. export review, which will be made with a presumption of denial.
"TSMC has received notification from the U.S. government that our VEU authorization for TSMC Nanjing will be revoked effective December 31, 2025," a statement by TSMC sent to Tom's Hardware reads. "While we are evaluating the situation and taking appropriate measures, including communicating with the U.S. government, we remain fully committed to ensuring the uninterrupted operation of TSMC Nanjing."
TSMC currently operates two fabs in China: a 200-mm Fab 10 in Shanghai, and a 300-mm Fab 16 in Nanjing. The 200-mm fab produces chips on legacy process technologies (such as 150nm and less advanced) and flies below the U.S. government's radar. By contrast, the 300-mm semiconductor production facility makes a variety of chips (e.g., automotive chips, 5G RF components, consumer SoCs, etc.) on TSMC's 12nm FinFET, 16nm FinFET, and 28nm-class production nodes and logic technologies of 16nm and below are restricted by the U.S. government even though they debuted about 10 years ago.
Business with customers from China accounted for 11% of TSMC's $90.08 billion net revenue in 2024, or roughly $9.91 billion, which is a lot of money. However, it is hard to estimate how much TSMC earned specifically from Fab 16.
Switching to China-made tools
One of the ways for TSMC to keep its Fab 16 in Nanjing running without U.S. equipment is to replace some of the tools it imports from the U.S. with similar equipment produced in China. However, it is unclear whether it is possible, particularly for lithography.
TSMC's 16nm technology relies on highly precise etch, deposition, lithography, metrology, and ion implantation tools produced by American and European companies. Although China-based AMEC, Kingsemi, Naura, and Piotech have made quite some progress with their cleaning, deposition and etching tools, they hardly currently offer full toolsets with the yield or precision that TSMC requires for commercial-grade 16nm production. Also, we do not know of any company in China that can produce lithography systems for a 16nm-class process technology.
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Even if Chinese firms could supply some tools, swapping out even one tool type in a mature process line integration with automation and fab control systems as well as involves full requalification of recipes and parameters. Furthermore, potential changes to yield and reliability can affect cycle time and financial targets of the fab.
In a normal situation, TSMC would likely resist such disruption, especially for legacy nodes meant to be cost-effective, but it may be forced to switch at least some of its tools even despite the fact that it cannot fully replace American and European tools at its Fab 16 in China.
Insignificant impact on TSMC, but good news for SMIC and HuaHong
The U.S. government has already removed similar permissions for Samsung and SK Hynix. However, compared to Samsung and SK hynix — both of which have a large manufacturing presence in mainland China — TSMC's Fab 16 footprint there is relatively limited (i.e., well below 10% of revenue, which is still a lot in dollar terms). To that end, even if TSMC is forced to halt operations at Fab 16 or reduce its output severely, the impact on the world's No. 1 contract chipmaker will be significantly less severe than on Samsung and SK hynix.
If TSMC is forced to halt or drastically reduce output at its Nanjing Fab 16, the ripple effects would be favorable to Chinese foundries like SMIC and Hua Hong as China-based customers will have to reallocate their production to SMIC (which offers 14nm and 28nm) or HuaHong (which has a 28nm node), which will boost their utilization and balance sheet (assuming of course they have enough capacity).
Furthermore, a forced TSMC slowdown in China will validate People's Republic's push for semiconductor self-sufficiency, which could mean increased subsidies for chipmakers and tool makers.
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Anton Shilov is a contributing writer at Tom’s Hardware. Over the past couple of decades, he has covered everything from CPUs and GPUs to supercomputers and from modern process technologies and latest fab tools to high-tech industry trends.
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das_stig TSMC have not been the best at keeping tech out of Chinese hands, so another step by President of United Staes of America, Commander-in-Chief of the Armed Forces, his Excellency President for Life, Field Marshal and Major General Al Hadji Doctor, VC, DSO, MC, Conqueror of the British Empire in Africa, Lord of All the Beasts of the Earth and Fishes of the Sea, and last King of Scotland, his Holiness Trump.Reply -
althuser
That's 😄 nice seal of authorityto have. The future of technology have never been better. The upside is that China will learn a valuable lesson again, they are going to ramp up on self dependence and set on a path to serious mass production of whatever they can mass produce.das_stig said:TSMC have not been the best at keeping tech out of Chinese hands, so another step by President of United Staes of America, Commander-in-Chief of the Armed Forces, his Excellency President for Life, Field Marshal and Major General Al Hadji Doctor, VC, DSO, MC, Conqueror of the British Empire in Africa, Lord of All the Beasts of the Earth and Fishes of the Sea, and last King of Scotland, his Holiness Trump. -
Gururu If they are going to cut another umbilical cord of leaked U.S. technology, they better make sure they can stay ahead of the engineering.Reply -
jp7189 Can someone explain to me, like I'm a 5 year old, why an EUV light is so hard to make? Im under the impression that an unlimited amount of money and near infinite man power (and any other resource) is available to those who wish to try.Reply -
ManDaddio
I'm no expert but I think only one company makes those machines. They're very expensive to make and very complex. Everything has to be pristine and build exactly to spec otherwise everything is messed up. Then you have the power issue and the water issue. The resources come into play after the fact.jp7189 said:Can someone explain to me, like I'm a 5 year old, why an EUV light is so hard to make? Im under the impression that an unlimited amount of money and near infinite man power (and any other resource) is available to those who wish to try. -
phead128
The CEO of ASML (the company who makes EUV lithography machines) has once said that the "laws of physics" is the same in Netherlands as it is in China. As in, you can't ban knowledge or physics.jp7189 said:Can someone explain to me, like I'm a 5 year old, why an EUV light is so hard to make? Im under the impression that an unlimited amount of money and near infinite man power (and any other resource) is available to those who wish to try.
That tells you all you need to know. -
jp7189
Your comment didnt help bring understanding. Maybe try again as if I were a 4 year old?phead128 said:The CEO of ASML (the company who makes EUV lithography machines) has once said that the "laws of physics" is the same in Netherlands as it is in China. As in, you can't ban knowledge or physics.
That tells you all you need to know.
Surely engineers within China are trying hard to create this and presumably they have obtained at least one example to reverse engineer. The best I've heard of is a mechanical quartz stamp for creating small features, but haven't heard of a functioning euv light source yet. The theory sounds simple enough - a drop of tin hit with lasers will produce a flash of euv light. Why is asml the only one that can make it happen? -
phead128
Key chipmakers such as Intel, Samsung, and TSMC played a crucial role in the early development and funding of ASML's EUV technology. They provided the vast majority of R&D funds for developing EUV tech. So obviously Intel, Samsung, TSMC became the biggest customers of ASML's technology, as they are an early major investor.jp7189 said:Your comment didnt help bring understanding. Maybe try again as if I were a 4 year old?
Surely engineers within China are trying hard to create this and presumably they have obtained at least one example to reverse engineer. The best I've heard of is a mechanical quartz stamp for creating small features, but haven't heard of a functioning euv light source yet. The theory sounds simple enough - a drop of tin hit with lasers will produce a flash of euv light. Why is asml the only one that can make it happen?
Japan's Canon and Nikon wanted to develop EUV lithography, and they have the engineering talent to develop EUV too, but unfortunately, there is no customers. The customers (Intel, Samsung, TSMC, etc...) are already invested in ASML's EUV tech. So Japan's Canon and Nikon quit the EUV game early because there is no major customers to return investment.
China had a EUV research lab unit working as early as 2005, but commercial scale is impossible due to same challenges as Japan's Canon - no major customers. Now, China has 5-6 parallel EUV lithography efforts due to tech war, and now Chinese companies have no choice except turn to domestic lithography options, so there is a captive market for Chinese EUV to flourish. -
jp7189
But why is it such a tough nut to crack? To my layman mind, an A bomb seems like a more challenging prospect, but lots of people have figured that out. Why is EUV (seemingly) so much more difficult to produce?phead128 said:Key chipmakers such as Intel, Samsung, and TSMC played a crucial role in the early development and funding of ASML's EUV technology. They provided the vast majority of R&D funds for developing EUV tech. So obviously Intel, Samsung, TSMC became the biggest customers of ASML's technology, as they are an early major investor.
Japan's Canon and Nikon wanted to develop EUV lithography, and they have the engineering talent to develop EUV too, but unfortunately, there is no customers. The customers (Intel, Samsung, TSMC, etc...) are already invested in ASML's EUV tech. So Japan's Canon and Nikon quit the EUV game early because there is no major customers to return investment.
China had a EUV research lab unit working as early as 2005, but commercial scale is impossible due to same challenges as Japan's Canon - no major customers. Now, China has 5-6 parallel EUV lithography efforts due to tech war, and now Chinese companies have no choice except turn to domestic lithography options, so there is a captive market for Chinese EUV to flourish. -
phead128
A-bombs is closer to national security, subsidized by taxpayers, so it doesn't have to make money or does not need to provide a monetary return.jp7189 said:But why is it such a tough nut to crack? To my layman mind, an A bomb seems like a more challenging prospect, but lots of people have figured that out. Why is EUV (seemingly) so much more difficult to produce?
EUV is really a private company investment, subsidized by shareholders, so it has to make money and recoup it's investment via operational efficiency. With EUV, there is only 3-4 customers in the world (Intel, Samsung, TSMC, SK hynix, Micron), and these same customers are ASML's biggest funders. You see the problem for anyone trying to break in....this niche industry has high-cost barrier to entry, and limited customers, it's like a cartel, an outsider will never win.
Ironically, by framing EUV as a national security issue, you are bringing the full resources of Chinese state and engineering talent into bear. It's a known problem too, it's really not an issue of technical complexity, but market opportunity why no one else has EUV competitor. Japan's Canon/Nikon gave up on EUV not because of complexity, but because Intel/Samsung/TSMC is already funding ASML's EUV project, there is no way for them to make any money on it or steal customers.