ASML
Latest about ASML

Corning's Extreme ULE glass debuts for next-gen High-NA EUV chipmaking
By Anton Shilov published
Corning introduces new Extreme ULE glass for photomasks and mirrors to be used with next-generation EUV and High-NA EUV tools.

Chinese company develops 65nm-capable lithography machine for domestic chipmaking
By Anton Shilov published
The Chinese government says domestic companies have developed litho tools capable of 65nm and 110nm resolution.

China's SMEE files patent for an EUV chipmaking tool — tool aims to break the shackles of ASML export restrictions
By Anton Shilov published
Shanghai Microelectronics Equipment patents key components of an EUV lithography tool.

China vexed at expansion of ASML chip tool export controls, reveals ministry statement
By Anton Shilov published
The Chinese government is not satisfied with the Dutch government's decision to export control ASML's Twinscan NXT:1970i and 1980i.

Russia bypasses sanctions and obtains spare parts for decades old ASML chip making machines: Report
By Anton Shilov published
Russian companies get spare parts for ASML's PAS 5500 lithography steppers from 1990s – 2000s through China-based intermediaries.

Dutch government to ban ASML from servicing installed wafer tools in China
By Anton Shilov published
ASML's advanced DUV tools installed at Chinese fabs may become inoperable next year if the Dutch government bans their service by ASML.

Japanese scientists develop simplified EUV scanner that can make production of chips considerably cheaper
By Anton Shilov published
OIST's simplified EUV litho system uses two mirrors instead of six.

New US government rules to allow export of some equipment to China by ASML, Tokyo Electron
By Anton Shilov published
The U.S. intends to add 120 Chinese entities to its Entity List, to close loopholes that enable Chinese chipmakers to obtain American chipmaking tools.
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