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Exclusive Interview: Going Three Levels Beyond Kernel Rootkits
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Nikon ships first immersion lithography system for 55 nm chip production
Next newsNikon Precision today said that it has shipped the world's first production immersion lithography system. The device, named NSR-S609B, was sold to a "major IC manufacturer" and will enable the mass prodsuction of 55 nm memory products and development of 45 nm devices.
According to Nikon, the system uses a proprietary Local Fill Technology, which eliminate scanner-induced immersion defects with no bubbles, water spots, or backside wafer contamination.
Source : Tom's Hardware US