Russian Researchers Develop Chipmaking Tool that Can Replace Litho Tools

TSMC
(Image credit: TSMC)

Researchers from St. Petersburg Polytechnic University (SPbPU) have developed a domestic lithographic complex for mask-less chip production using etching, an important towards Russia's microelectronics self-sufficiency, reports CNews, citing state-owned RIA Novosti. One of the tools costs five million rubles ($49.5 thousand), the price of a modern car, and the cost of another is unknown.

The complex consists of two tools. The first device is designed for "maskless nanolithography," it projects images onto substrates without a mask. The second tool, which builds on the substrate patterns made by the first, is responsible for forming nanostructures using etching. Furthermore, this installation can craft silicon membranes for applications such as ship overpressure sensors. Notably, these membranes are touted to be more reliable and sensitive than those produced by other methods.

Beyond making chips or silicon membranes, these two installations can significantly benefit other industries. For instance, they can increase the lifespan of radar equipment by over 20 times. In the realm of green energy, these tools can miniaturize solar panels, making them lighter and enhancing their efficiency. 

Anton Shilov
Contributing Writer

Anton Shilov is a contributing writer at Tom’s Hardware. Over the past couple of decades, he has covered everything from CPUs and GPUs to supercomputers and from modern process technologies and latest fab tools to high-tech industry trends.