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TSMC: Immersion lithography nearly production ready
11:42 AM - February 24, 2006 by
From the Web
Source: Tom's Hardware US – Keywords: tsmc, immersion, lithography 0 comment
Syndication:
Source: Tom's Hardware US – Keywords: tsmc, immersion, lithography 0 comment
Syndication:
Taiwan Semiconductor Manufacturing Company (TSMC) revealed that its immersion lithography program has produced test wafers well within acceptable parameters for volume manufacturing, according to a company press release. TSMC's immersion lithography technology is targeted at TSMC's 45nm manufacturing process.
More here at DigiTimes.
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