EUV
Latest about EUV

By Anton Shilov Published
Shanghai Microelectronics Equipment patents key components of an EUV lithography tool.

By Anton Shilov Published
TSMC to start installing High-NA EUV system for R&D purposes this month.

By Anton Shilov Published
Intel and Japan's National Institute of Advanced Industrial Science and Technology to establish semiconductor R&D center to advance Japanese chip industry.

By Anton Shilov Published
SK hynix says adopting 4F2 structures and 3D transistors will increase the cost-efficiency of EUV lithography usage in DRAM production.

By Anton Shilov Published
Samsung will be about a year behind Intel in installing ASML's Twinscan EXE:5000 High-NA litho tool for development purposes.

By Anton Shilov Published
OIST's simplified EUV litho system uses two mirrors instead of six.

By Anton Shilov Published
The U.S. government approves shipments of wafer fab equipment to many Chinese fabs, other are banned. Question is, can those tools be installed in banned fabs?

By Anton Shilov Published
Tokyo Electron unveils the Acrevia tool, which can improve patterning with gas cluster beam technology.

By Anton Shilov Published
Micron reiterates its plans to use EUV for high-volume DRAM production next year as it starts pilot production on a 1-gamma node.

By Paul Alcorn Published
Intel CEO Pat Gelsinger told Tom's Hardware during a question and answer session at Computex 2024 that China must make its own processors if US sanctions on the latest chips become too restrictive.
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